•High power/high energy output
•All solid state switch, long life, good energy stability
•Metal-ceramic cavity structure, long gas life
• Mainly used for ELA (laser annealing), LLO (laser lift off), large area thin film preparation
Features:
•High power/high energy output
•All solid state switch, long life, good energy stability
•Metal-ceramic cavity structure, long gas life
• Mainly used for ELA (laser annealing), LLO (laser lift off), large area thin film preparation
Application: fiber grating writing, fine processing, fine marking, spectrum analysis
technical parameter | |||
Medium gas | ArF | KrF | XeCl |
Wavelength (nm) | 193 | 248 | 308 |
Maximum single pulse energy (mJ) | 30 | 60 | 40 |
Average power (W) | 5 | 10 | 6 |
Maximum repetition frequency (Hz) | 200 | ||
Pulse width (FWHM, ns) | ~15 | ||
Energy stability (sigma %) | 2 | ||
Spot size (mm) (V*H) | 10×5 | ||
Divergence angle (mrad) (V*H) | ~2×1 | ||
Product size (mm) (L*W*H) | 1015×537×582 | ||
Weight (kg) | 100 | ||
Power requirements | 220V, 50Hz, 10A | ||
cooling method | Air-cooled | ||
interactive mode | Control system: RS232 (LCD screen/PC) | ||
External trigger: electrical signal |
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