PLD20, PLD20L, PLD30 excimer laser_ShenZhen Hoyatek Co.,Ltd.

Light Source: ASE light source SLED light source Ultra-wideband light source Single wavelength (DFB) light source (ITU-T standard wavelength, customized wavelength) Multi-wavelength light source CWDM/ DWDM/ LAN-WDM multi-channel light source Scanning laser light source Tunable laser light source Narrow linewidth light source Pulsed laser light source Pump light source (980/1480) Medical beauty light source

Optical Amplifier: CATV EDFA Erbium Doped Fiber Amplifier SDH EDFA Erbium Doped Fiber Amplifier DWDM EDFA Erbium Doped Fiber Amplifier SOA Semiconductor Optical Amplifier Polarization Maintaining Amplifier High power optical amplifier TDFA Thulium Doped Fiber Amplifier YDFA Ytterbium Doped Fiber Amplifier

Light Switch: MEMS optical switch Mechanical optical switch Multimode mechanical optical switch Optical switch remote control system

Optical Signal Analysis Equipment: Slot scanning beam analyzer system Passive component test production system Fiber grating signal analyzer DTS distributed temperature sensor analyzer DAS distributed vibration sensor analyzer DVS distributed vibration sensor analyzer High-precision distributed optical fiber sensor analyzer (millimeter level)

Industry Application System: Pressure system Contingency system Temperature monitoring system Gas concentration system

Passive Components and Others: Passive components Optical cable wiring Splice box Heat shrink tube End face monitoring and cleaning tools Consumables Supporting device

• Pulse energy up to 800mJ

•Using the design of magnetic assist excitation circuit to extend the life of the thyratron

• Built-in energy feedback system, good energy stability

• Internal trigger/external trigger

Product description Parameter

Features:

• Pulse energy up to 800mJ

•Using the design of magnetic assist excitation circuit to extend the life of the thyratron

• Built-in energy feedback system, good energy stability

• Internal trigger/external trigger

Application: laser deposition of thin films, fine processing, material surface treatment, laser annealing

Specification:

PLD30/PLD20：1500×450×880mm PLD20L：1600×405×880mm (230kg）

PLD20, PLD20L, PLD30 excimer laser (Figure 1)

technical parameter
Medium gas		ArF	KrF	XeCl	Chef
Wavelength (nm)		193	248	308	351
Maximum single pulse energy (mJ)	PLD30	200	500	300	200
	PLD20	300	650	400	300
	PLD20L	400	800	500	400
Average power (W)	PLD30	5	14	8	5
	PLD20	5	12	8	5
	PLD20L	7	14	9	7
Maximum repetition frequency (Hz)	PLD30	30
	PLD20	20
	PLD20L	20
Pulse width (FWHM, ns)	PLD30	～25
	PLD20
	PLD20L
Spot size (mm) (V*H)	PLD30	～24×8
	PLD20
	PLD20L
Energy stability (sigma,%)	1 (Measured at 248nm output)
Divergence angle (mrad) (V*H)	~3×1
cooling method	Water cooling
interactive mode	Control system: RS232 (LCD screen/PC)
interactive mode	External trigger: optical signal