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EL30 excimer laser
EL30 excimer laser

EL30 excimer laser

Features:

 •Built-in energy detector, capable of constant energy operation for a long time

 • Touch screen/computer can control simultaneously

 •The control interface is simple and clear


Applications: Laser deposition of thin films, fine processing, material surface treatment, laser annealing

EL series product features:

 •Pulse energy up to 800mJ

 • Using magnetic booster excitation circuit design to extend the life of the thyristor

 •Built-in energy feedback system, good energy stability

 •Internal trigger/external trigger


Applications: Laser deposition of thin films, fine processing, material surface treatment, laser annealing


EL30 technical parameters

Wavelength(nm)

193

248

308

Pulse energy(mJ)

200

500

250

Maximum repetition frequency (Hz)

30

30

30

Average power(W)

5

14

12

Energy stability (1 sigma  %)

1

1

1

Pulse width(FWHM)(ns)

25

Beam size (VxH, FWHM) (mm 2 )

(26±1)X(9±1)

Divergence angle (VxH,FWHM) (mrad 2 )

≤3x1

powered by

220VAC,10A,50Hz

cool down

Water cooled, 2 to 5 L/min

Interaction mode

touch screen or computer

external trigger

Optical and electrical signals

Synchronous output signal

electric signal

weight

300kg

Dimensions(LxWxH)

1310X405X870m3


Specification     

EL30:1310×405×870mmm  (300kg)

EL30准分子激光器(图1)


Industry Applications